The separation of SF₆ gas from an SF₆/N₂ mixed gas can be effectively achieved by using appropriate zeolites. A Ca-A type zeolite, with an effective micropore diameter of 0.5 nm, was selected as the primary adsorbent material due to its high affinity for nitrogen (N₂) molecules, while a Na-X type zeolite, with a larger pore size of 1 nm, was used as a secondary adsorbent that preferentially adsorbs SF₆ molecules. This combination allows for efficient and selective separation of the two gases.
In this process, a pressure swing adsorption (PSA) system is employed to separate SF₆ from N₂. The system consists of two main adsorbers filled with Ca-A zeolite, enabling continuous operation by alternating between adsorption and desorption phases. One adsorber takes in the gas mixture while the other releases purified gas, ensuring uninterrupted performance. An auxiliary adsorber filled with Na-X zeolite is also integrated into the system to further enhance the separation efficiency.
The process begins with the mixed gas being filtered to remove moisture and impurities before entering the main adsorber. During the adsorption phase, N₂ is efficiently captured by the Ca-A zeolite, allowing most of the SF₆ to pass through and enter the liquefaction system. This system includes a compressor and a cooling tube, where the SF₆ gas is compressed, cooled, and eventually liquefied. The liquid SF₆ is then stored in a tank, while any remaining gas—primarily a mixture of SF₆ and N₂—is directed back to the main adsorber via a buffer tank for further processing.
Next, the N₂ and a small amount of SF₆ that were adsorbed in the main adsorber are transferred to the auxiliary adsorber. Here, the SF₆ is retained by the Na-X zeolite, while the N₂ is released into the atmosphere. Experimental results show that the SF₆ concentration in the discharged gas is as low as 0.06 μL/L, indicating a very high level of purity. The PSA system is capable of processing up to 13 liters of gas per minute, making it suitable for industrial applications. This setup not only ensures efficient gas separation but also supports sustainable and cost-effective operations.
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